The room temperature vacuum probe station can provide a room temperature vacuum test environment for the measurement of electrical parameters of semiconductor chips，Through the external connection of different electrical measuring instruments，Can complete the integrated circuit voltage, current, resistance and IV curve and other parameters detection，For non-destructive electrical testing of chips, wafers and devices in vacuum environments at room temperature。

  PSV series Room temperature vacuum probe station is a probe station specially developed for room temperature vacuum electrical measurement environment，Ability to perform repeated nondestructive, standard electrical experiments on 2 - and 4-inch wafers，The electrical characteristics measurement, parameter measurement, DC measurement and RF measurement of the device can be completed by connecting different test equipment。

特点
• The ultimate vacuum degree of the vacuum chamber can reach 5E^-4 mbar, vacuum through the vacuum pump connected to the KF25 flange。
• The sample holder can hold a 4-inch wafer sample, and the displacement adjustment of the probe arm operates outside the vacuum chamber to switch different components on the sample for testing without destroying the vacuum。The probe arm can be adjusted in four dimensions in the X-Y-Z-R range and can meet the needling test in all positions in the 4-inch range。
• The vacuum chamber is made of aluminum, which can effectively reduce external electromagnetic interference and improve the accuracy and stability of the test。
• DC probe arm adopts triaxial connector, good leakage performance, using 4200 measured leakage current is less than 100fA@1V。
• Uniquely designed flexible probe, which is mounted on copper shrapnel to avoid sample or electrode damage due to excessive force during needle insertion。
• Optional microwave probe arm up to 110GHz。

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