The main purpose of the compact room temperature manual probe station is to provide a test platform for the electrical parameter testing of semiconductor chips，External connection of different measuring instruments，With measuring instrument, it can detect the voltage, current, resistance and capacitance voltage characteristic curve of integrated circuit，For non-destructive testing of ultra-small chip wafers and devices at room temperature。
The SPSM series compact room temperature manual probe station is an affordable, entry-level probe station that can perform a large number of non-destructive, standard electrical experiments on 2 "and 4" wafers, and can complete electrical characteristics measurement, parameter measurement, and DC measurement of devices with different external test equipment。The compact desktop design is the choice for academic and experimental research。
特点
• Sample holder can hold 4-inch wafer samples
• The displacement seat under the sample seat can realize 3D fine displacement adjustment of the sample seat, making sample testing and sample changing more convenient。
• 6 probe arms can be mounted
• The probe arm adopts magnet adsorption, can be moved arbitrarily, and can be fine-tuned in three dimensions, easy operation, precise needle insertion, the probe of the four probe arms can be inserted into any position of the sample。
• The probe arm adopts three coaxial cables and three coaxial connectors, and the leakage current is small, within 100fA
• CCD magnification is 180 times, working distance is 100mm
Model classification:
