The room temperature electromagnet probe can not only complete the test that the permanent magnet probe can complete, but also provide a variable magnetic field for the sample test, which has a strong magnetic field and a large uniform field area。Designed specifically for experiments that require continuous magnetic field changes during measurement, this probe station performs non-destructive testing of chips, wafers and devices at room temperature。
PSEM Series Room temperature electromagnetic probe station is a probe station specially developed for room temperature variable magnetic field electrical measurement environment, offering ±0.6T vertical magnetic field or ±0.The 3T horizontal magnetic field can carry out repeatable and standard electrical experiments on 2-inch and 4-inch wafers, and different external test equipment can complete the electrical characteristics measurement, parameter measurement, DC measurement, RF measurement and Hall measurement of the device。
特点
• A 4-inch wafer sample can be placed in the sample holder. By moving the slide table below the sample holder, the X-Y axis can be moved ±50mm, and the sample holder itself can be fine-adjusted in three dimensions, making sample testing and sample changing more convenient。
• The base of the probe arm is fixed by magnet adsorption, which enables the probe to be adjusted in the three dimensions of X-Y-Z. With the adjustment of the sample seat, the probe can be quickly inserted to any position of the 4-inch sample (6 probe arms can be installed, and 4 horizontal magnetic field electromagnet probe stations can be installed).
• The probe arm adopts three-coaxial cables and three-coaxial connectors. The leakage is small and the leakage current is less than 100fA. The probe arm has built-in cables to avoid messy wiring
• The probe is fixed with a needle sleeve, only the tip of the needle is exposed to reduce leakage
• The electromagnet stand and probe stand are separated to prevent vibration from being transmitted to the sample during magnet movement
• The sample fixation method adopts porous partition adsorption, with an outer ring, an inner ring and three separately controlled gas adsorption channels in the middle, which can adsorb and fix 1mm*1mm samples
• CCD magnification is 180 times, working distance is 100mm
Model classification:
